Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이시우 | - |
| dc.date.accessioned | 2018-06-23T14:01:29Z | - |
| dc.date.available | 2018-06-23T14:01:29Z | - |
| dc.date.created | 2009-03-27 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/90554 | - |
| dc.publisher | American Vacuum Society | - |
| dc.relation.isPartOf | AVS 5th International Conference on Atomic Layer Deposition | - |
| dc.relation.isPartOf | AVS 5th International Conference on Atomic Layer Deposition | - |
| dc.title | In-situ FT-IR diagnosis of precursors used in ALD process | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | AVS 5th International Conference on Atomic Layer Deposition | - |
| dc.citation.conferenceDate | 2006-07-24 | - |
| dc.citation.conferencePlace | US | - |
| dc.citation.title | AVS 5th International Conference on Atomic Layer Deposition | - |
| dc.contributor.affiliatedAuthor | 이시우 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.