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In-situ diagnosis using FT-IR and the characterization of Hf nitride films
- Title
- In-situ diagnosis using FT-IR and the characterization of Hf nitride films
- Authors
- 이시우
- Publisher
- 한국진공학회
- Article Type
- Conference
- Citation
- 제31회 한국진공학회 학술논문발표회
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