Conference
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Solid phase formation and stoichiometry of the plasma-enhanced atomic layer deposited Tantalum carbo-nitride films using TBTDET and hydrogen
- Title
- Solid phase formation and stoichiometry of the plasma-enhanced atomic layer deposited Tantalum carbo-nitride films using TBTDET and hydrogen
- Authors
- 이시우
- Publisher
- 한국화학공학회
- Article Type
- Conference
- Citation
- 한국화학공학회 2008년도 봄 총회 및 학술대회, page. 341
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.