Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이시우 | - |
| dc.date.accessioned | 2018-06-23T13:55:13Z | - |
| dc.date.available | 2018-06-23T13:55:13Z | - |
| dc.date.created | 2009-03-27 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/90473 | - |
| dc.publisher | 한국표준과학연구원 | - |
| dc.relation.isPartOf | 제 2회 반도체공정 진단 Workshop | - |
| dc.relation.isPartOf | 제 2회 반도체공정 진단 Workshop | - |
| dc.title | In-situ diagnostics of the atomic layer deposition process using FT-IR and residual gas analysis system | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 제 2회 반도체공정 진단 Workshop, pp.119 | - |
| dc.citation.conferenceDate | 2008-06-24 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.startPage | 119 | - |
| dc.citation.title | 제 2회 반도체공정 진단 Workshop | - |
| dc.contributor.affiliatedAuthor | 이시우 | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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