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STEM-HAADF analysis of high quality epitaxial CoSi2 grown on Si(001) by using plasma nitridation-mediated epitaxy
- Title
- STEM-HAADF analysis of high quality epitaxial CoSi2 grown on Si(001) by using plasma nitridation-mediated epitaxy
- Authors
- 박찬경
- Publisher
- 한국표준과학원
- Article Type
- Conference
- Citation
- 한국현미경학회 추계학술대회
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg