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Three Dimensional Charg-up Simulation using the Electro-negative Discharge with Pulsed Power Source
- Title
- Three Dimensional Charg-up Simulation using the Electro-negative Discharge with Pulsed Power Source
- Authors
- 남궁원
- Publisher
- 한국물리학회
- Article Type
- Conference
- Citation
- 한국물리학회
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