Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이시우 | - |
| dc.date.accessioned | 2018-06-22T02:54:24Z | - |
| dc.date.available | 2018-06-22T02:54:24Z | - |
| dc.date.created | 2009-03-27 | - |
| dc.date.issued | 1999-01-01 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/86496 | - |
| dc.publisher | MRS | - |
| dc.relation.isPartOf | Mat. Res. Soc. Symp. Proc. | - |
| dc.relation.isPartOf | Mat. Res. Soc. Symp. Proc.,Amorphous and Microcrystalline Silicon Technology-1998, | - |
| dc.title | FLOURINATED SILICON NITRIDE FILM DEPOSITED AT LOW TEMPERATURES FROM SiH4-SiF4-NH3 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | Mat. Res. Soc. Symp. Proc., pp.471 | - |
| dc.citation.conferencePlace | US | - |
| dc.citation.startPage | 471 | - |
| dc.citation.title | Mat. Res. Soc. Symp. Proc. | - |
| dc.contributor.affiliatedAuthor | 이시우 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
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