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FLOURINATED SILICON NITRIDE FILM DEPOSITED AT LOW TEMPERATURES FROM SiH4-SiF4-NH3
- Title
- FLOURINATED SILICON NITRIDE FILM DEPOSITED AT LOW TEMPERATURES FROM SiH4-SiF4-NH3
- Authors
- 이시우
- Date Issued
- 1999-01-01
- Publisher
- MRS
- Article Type
- Conference
- Citation
- Mat. Res. Soc. Symp. Proc., page. 471, 1999-01-01
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- There are no files associated with this item.
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