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METAL ORGANIC CHEMICAL VAPOR DEPOSITION OF COPPER THIN FILMS FROM (hfac)Cu(VCH) AND (hfac)Cu(4MP)
- Title
- METAL ORGANIC CHEMICAL VAPOR DEPOSITION OF COPPER THIN FILMS FROM (hfac)Cu(VCH) AND (hfac)Cu(4MP)
- Authors
- 이시우
- Date Issued
- 1999-01-01
- Article Type
- Conference
- Citation
- First Asian conference on Chemical Vapor Deposition, 1999-01-01
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