In-Situ GISAXS Studies on the Evolution of Closed Nanopores in Low-k Organosilicate Dielectric Thin Films
- Title
- In-Situ GISAXS Studies on the Evolution of Closed Nanopores in Low-k Organosilicate Dielectric Thin Films
- Authors
- 이문호
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/85853
- Article Type
- Conference
- Citation
- Joint Conference of the Asian Crystallographic Association and the Crystallographic Society of Japan
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