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Characterization of Low-k Dielectric Films with Bistrimethylsilylmethane using GISAXS and X-ray Reflectivity
- Title
- Characterization of Low-k Dielectric Films with Bistrimethylsilylmethane using GISAXS and X-ray Reflectivity
- Authors
- 이문호
- Publisher
- HASYLAB/DESY, Notkestr. 85, D-22607
- Article Type
- Conference
- Citation
- 2nd Workshop “GISAXS - An Advanced Scattering Method”
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Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry