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Imprinting well-controlled closed-nanopores in spin-on polymeric dielectric thin films with using six-armed star shape porogens
- Title
- Imprinting well-controlled closed-nanopores in spin-on polymeric dielectric thin films with using six-armed star shape porogens
- Authors
- 이문호
- Publisher
- HASYLAB/DESY, Notkestr. 85, D-22607
- Article Type
- Conference
- Citation
- 2nd Workshop “GISAXS - An Advanced Scattering Method”
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Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry