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Grazing Incidence Small Angle X-ray Scattering Studies on Nanopore Evolutions in Low-k Dielectric Thin Films

Title
Grazing Incidence Small Angle X-ray Scattering Studies on Nanopore Evolutions in Low-k Dielectric Thin Films
Authors
이문호
URI
https://oasis.postech.ac.kr/handle/2014.oak/85796
Article Type
Conference
Citation
NSTI Nanotech 2007
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이문호REE, MOONHOR
Dept of Chemistry
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