Grazing Incidence Small Angle X-ray Scattering Studies on Nanopore Evolutions in Low-k Dielectric Thin Films
- Title
- Grazing Incidence Small Angle X-ray Scattering Studies on Nanopore Evolutions in Low-k Dielectric Thin Films
- Authors
- 이문호
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/85796
- Article Type
- Conference
- Citation
- NSTI Nanotech 2007
- Files in This Item:
- There are no files associated with this item.
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