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A new capacitive displacement sensor with high accuracy and long range

Title
A new capacitive displacement sensor with high accuracy and long range
Authors
문원규
POSTECH Authors
문원규
Publisher
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems
URI
http://oasis.postech.ac.kr/handle/2014.oak/84012
Article Type
Conference
Citation
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, page. 559 - 562
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문원규MOON, WON KYU
Dept of Mechanical Enginrg
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