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0.4nm 해상도의 엔코더 타입 전기용량형 변위센서
- Title
- 0.4nm 해상도의 엔코더 타입 전기용량형 변위센서
- Authors
- 문원규
- POSTECH Authors
- 문원규
- Publisher
- 대한기계학회
- Article Type
- Conference
- Citation
- 대한기계학회, page. 1450 - 1454
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Related Researcher
- 문원규MOON, WON KYU
- Dept of Mechanical Enginrg