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Nanostructure Fabrication through Selective Epitaxial Growth of SiGe on the Self-Assembled Nanotemplates Using Ultrahigh Vacuum Chemical Vapor Deposition

Title
Nanostructure Fabrication through Selective Epitaxial Growth of SiGe on the Self-Assembled Nanotemplates Using Ultrahigh Vacuum Chemical Vapor Deposition
Authors
김형준
URI
https://oasis.postech.ac.kr/handle/2014.oak/83925
Article Type
Conference
Citation
Joint Symposium on Material Science and Engineering for the 21th Century
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김형준KIM, HYUNGJUN
Dept of Materials Science & Enginrg
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