Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이시우 | - |
| dc.date.accessioned | 2018-06-21T13:52:12Z | - |
| dc.date.available | 2018-06-21T13:52:12Z | - |
| dc.date.created | 2009-03-27 | - |
| dc.date.issued | 1996-01-01 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/82811 | - |
| dc.relation.isPartOf | Key Tech. & Appl. of Adv. Mater., Proc. of 2nd Korean-Japan Symposium on Adv. Mater. | - |
| dc.relation.isPartOf | Key Tech. & Appl. of Adv. Mater., Proc. of 2nd Korean-Japan Symposium on Adv. Mater | - |
| dc.title | Remote plasma enhanced metal organic chemical vapor deposition of TiN for diffusion barrier | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | Key Tech. & Appl. of Adv. Mater., Proc. of 2nd Korean-Japan Symposium on Adv. Mater., pp.202 | - |
| dc.citation.startPage | 202 | - |
| dc.citation.title | Key Tech. & Appl. of Adv. Mater., Proc. of 2nd Korean-Japan Symposium on Adv. Mater. | - |
| dc.contributor.affiliatedAuthor | 이시우 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
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