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Thermal decomposition and desorption of TDEAZr(Zr(N(C2H5)2)4) on Si(100)
- Title
- Thermal decomposition and desorption of TDEAZr(Zr(N(C2H5)2)4) on Si(100)
- Authors
- 용기중
- Date Issued
- 2002-08-01
- Publisher
- Hanyang University
- Article Type
- Conference
- Citation
- American Vacuum Society, page. 60, 2002-08-01
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