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DRAM Capacitor에서 전극의 미세구조와 확산방지막에 관한연구
- Title
- DRAM Capacitor에서 전극의 미세구조와 확산방지막에 관한연구
- Authors
- 박찬경
- Date Issued
- 1996-09-01
- Publisher
- 서울대
- Article Type
- Conference
- Citation
- 차세대반도체기반기술사업 최종발표회, 1996-09-01
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg