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스퍼터링으로 제조된 DRAM용 Ba0.5Sr0.5TiO3 강유전체 박막의 미세구조 및 전기적 특성

Title
스퍼터링으로 제조된 DRAM용 Ba0.5Sr0.5TiO3 강유전체 박막의 미세구조 및 전기적 특성
Authors
장현명
POSTECH Authors
장현명
Date Issued
1-Oct-1997
Publisher
한국세라믹학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/81650
Article Type
Conference
Citation
한국요업학회 추계 학술 발표회, 1997-10-01
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장현명JANG, HYUN MYUNG
Convergence Science and Technology
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