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FT-IR Diagnostics of Gas Phase Reactions and Effect of Carrier Gases in the Metal-Organic Chemical Vapor Deposition of Aluminum from Dimethylethylamine Alane
- Title
- FT-IR Diagnostics of Gas Phase Reactions and Effect of Carrier Gases in the Metal-Organic Chemical Vapor Deposition of Aluminum from Dimethylethylamine Alane
- Authors
- 이시우
- Date Issued
- 1997-01-01
- Publisher
- The Electrochem. Soc
- Article Type
- Conference
- Citation
- Proc. of the 14th Int. Conf. on CVD and EUROCVD-11, page. 1551, 1997-01-01
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