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Morphology enhancement of (Ba,Sr)TiO3 thin films with Ti(dmae)4 as a Ti source by direct liquid injection MOCVD
- Title
- Morphology enhancement of (Ba,Sr)TiO3 thin films with Ti(dmae)4 as a Ti source by direct liquid injection MOCVD
- Authors
- 이시우
- Date Issued
- 1999-06-18
- Publisher
- 한국화학공학회
- Article Type
- Conference
- Citation
- 제2회 CVD심포지움, page. 44, 1999-06-18
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