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Direct Liquid Injection Metal Organic Chemical Vapor Deposition of HfO2 Thin Films Using Hf(dimethylaminoethoxide)4
- Title
- Direct Liquid Injection Metal Organic Chemical Vapor Deposition of HfO2 Thin Films Using Hf(dimethylaminoethoxide)4
- Authors
- 이시우
- Date Issued
- 2003-12-12
- Publisher
- 한국반도체장비학회
- Article Type
- Conference
- Citation
- 2003년도 한국반도체장비학회 추계학술대회, page. 45 - 49, 2003-12-12
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