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Study on Time-varying Plasma Impedance for Plasma Source Ion Implantation (PSII)
- Title
- Study on Time-varying Plasma Impedance for Plasma Source Ion Implantation (PSII)
- Authors
- 남궁원
- Date Issued
- 2000-01-01
- Publisher
- 한국물리학회
- Article Type
- Conference
- Citation
- 한국물리학회 회보, page. 193, 2000-01-01
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