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Study on Time-varying Plasma Impedance for Plasma Source Ion Implantation (PSII)

Title
Study on Time-varying Plasma Impedance for Plasma Source Ion Implantation (PSII)
Authors
조무현
POSTECH Authors
조무현
Date Issued
2000-01-01
Publisher
한국물리학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/76556
Article Type
Conference
Citation
한국물리학회회보, page. 193, 2000-01-01
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조무현CHO, MOO HYUN
Div. of Advanced Nuclear Enginrg
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