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Residual Stress and Optical Properties of Low Dielectric MSSQ Thin Films: Effects of Curing Temperature and Thickness Variation
- Title
- Residual Stress and Optical Properties of Low Dielectric MSSQ Thin Films: Effects of Curing Temperature and Thickness Variation
- Authors
- 이문호
- Date Issued
- 2000-02-01
- Article Type
- Conference
- Citation
- 1st Postech Polymer Symposium, page. 14 - 14, 2000-02-01
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Related Researcher
- 이문호REE, MOONHOR
- Dept of Chemistry