물체의 표면현상 측정에 있어 정밀도 향상을 위한 위상더하기 방법의 활용

Abstract

We use the technique based on shifting the illumination beam which is relatively achieved less costly than those based on variations of wavelength in surface shape measurement. We can control the sensitivity by controlling the illumination angle and tilt angle. Therefore we can apply this method for measurement the object with various sizes. But there have limitation of tilt angle due to decorrelation. So we suggest phase summation procedure for enhancement of the sensitivity. This method has more good sensitivity than the present method that only subtract procedure phase. We performed the experiment set-up and introduce some techniques that can reduce the speckle noise. And we prove that this procedure has the superiority. Also we explain limitation of this method.