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Direct liquid injection-metal organic chemical vapor deposition 공정을 이용한 BLT 강유전체 박막의 증착
- Title
- Direct liquid injection-metal organic chemical vapor deposition 공정을 이용한 BLT 강유전체 박막의 증착
- Authors
- 이시우
- Date Issued
- 2002-10-24
- Publisher
- 한국화학공학회
- Article Type
- Conference
- Citation
- 화학공학의 이론과 응용, page. 4810 - 4813, 2002-10-24
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