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새로운 단일 전구체를 이용한 Zr silicate의 원자층 화학증착법

Title
새로운 단일 전구체를 이용한 Zr silicate의 원자층 화학증착법
Authors
이시우
Date Issued
2002-11-01
Publisher
한국재료학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/75361
Article Type
Conference
Citation
2002년도 한국재료학회, page. 96, 2002-11-01
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