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화학증착 및 원자층화학증착 표면화학 : 박막증착 관련 화학전구체의 Si(100), GaSb(100) 표면반응 연구

Title
화학증착 및 원자층화학증착 표면화학 : 박막증착 관련 화학전구체의 Si(100), GaSb(100) 표면반응 연구
Authors
용기중
POSTECH Authors
용기중
Date Issued
2002-02-01
Publisher
한국진공학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/74476
Article Type
Conference
Citation
제22회 한국진공학회 학술발표회, 2002-02-01
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용기중YONG, KIJUNG
Dept. of Chemical Enginrg
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