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Tetrakis(diethylamido)zirconium (TDEAZr)의 Si(100) 표면에서의 열 분해에 대한 표면 화학 연구
- Title
- Tetrakis(diethylamido)zirconium (TDEAZr)의 Si(100) 표면에서의 열 분해에 대한 표면 화학 연구
- Authors
- 용기중
- Date Issued
- 2002-10-01
- Publisher
- 한국화학공학회
- Article Type
- Conference
- Citation
- Theories and Applications of Chemical Engineering, 2002-10-01
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