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Low temperature Cu thin film growth using cycles of alternate supply of (hfac)Cu(DMB) and Ar purge gas
- Title
- Low temperature Cu thin film growth using cycles of alternate supply of (hfac)Cu(DMB) and Ar purge gas
- Authors
- 용기중
- Date Issued
- 2003-05-02
- Article Type
- Conference
- Citation
- ECS 2003 Fall Meeting/CVD XVI and EuroCVD14, 2003-05-02
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Related Researcher
- 용기중YONG, KIJUNG
- Dept. of Chemical Enginrg