Low temperature Cu thin film growth using cycles of alternate supply of (hfac)Cu(DMB) and Ar purge gas
- Title
- Low temperature Cu thin film growth using cycles of alternate supply of (hfac)Cu(DMB) and Ar purge gas
- Authors
- 용기중
- Date Issued
- 2003-05-02
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/73992
- Article Type
- Conference
- Citation
- ECS 2003 Fall Meeting/CVD XVI and EuroCVD14, 2003-05-02
- Files in This Item:
- There are no files associated with this item.
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