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Effects of neutralizers on the crystal orientation of YSZ films grown by ion beam sputtering
- Title
- Effects of neutralizers on the crystal orientation of YSZ films grown by ion beam sputtering
- Authors
- 박찬경
- Date Issued
- 2003-06-01
- Publisher
- ISSP
- Article Type
- Conference
- Citation
- The 7th International Symposium on Sputtering&Plasma Processing, page. 413 - 416, 2003-06-01
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg