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Fabrication and characterization of 3-Dimensional MOS transistor tip integrated micro cantilever

Title
Fabrication and characterization of 3-Dimensional MOS transistor tip integrated micro cantilever
Authors
문원규
POSTECH Authors
문원규
Date Issued
2005-01-01
Publisher
HARMST
URI
https://oasis.postech.ac.kr/handle/2014.oak/73309
Article Type
Conference
Citation
HARMST, page. 182 - 183, 2005-01-01
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문원규MOON, WON KYU
Dept of Mechanical Enginrg
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