Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이시우 | - |
| dc.date.accessioned | 2018-06-21T03:08:56Z | - |
| dc.date.available | 2018-06-21T03:08:56Z | - |
| dc.date.created | 2009-03-27 | - |
| dc.date.issued | 2006-02-23 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/72878 | - |
| dc.publisher | 한국 반도체 학술대회 | - |
| dc.relation.isPartOf | 제13회 한국 반도체 학술대회 | - |
| dc.relation.isPartOf | 제13회 한국 반도체 학술대회 초록집 | - |
| dc.title | Plasma Enhanced chemical vapor Deposition and Characterization of SiCOH low k Films with Vinyltrimethylsilane, di and Tetravinyl silane | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 제13회 한국 반도체 학술대회, pp.873 | - |
| dc.citation.conferenceDate | 2006-02-23 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.startPage | 873 | - |
| dc.citation.title | 제13회 한국 반도체 학술대회 | - |
| dc.contributor.affiliatedAuthor | 이시우 | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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