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Tetrakis-diethylmido hafnium, Trimethyl aluminum 그리고 Water을 이용한 hafnia-alumina nano laminate 박막의 원자층 화학증착

Title
Tetrakis-diethylmido hafnium, Trimethyl aluminum 그리고 Water을 이용한 hafnia-alumina nano laminate 박막의 원자층 화학증착
Authors
김석훈
Date Issued
2003
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906385
http://oasis.postech.ac.kr/handle/2014.oak/6603
Article Type
Thesis
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