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Atomic layer deposition of hafnium silicate films and its application to OTFTs
- Title
- Atomic layer deposition of hafnium silicate films and its application to OTFTs
- Authors
- 용기중
- Date Issued
- 2010-04-25
- Publisher
- The Electrochemical Society
- Article Type
- Conference
- Citation
- ECS 217th meeting, 2010-04-25
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