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An Estimation of the Mask Shadow Effect and its Compensation as Flexible Illumination system in EUVL
- Title
- An Estimation of the Mask Shadow Effect and its Compensation as Flexible Illumination system in EUVL
- Authors
- 김오현
- POSTECH Authors
- 김오현
- Date Issued
- 5-Jun-2012
- Publisher
- EUV Litho, Inc.
- Article Type
- Conference
- Citation
- 2012 EUVL WS, 2012-06-05
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Related Researcher
- 김오현KIM, OHYUN
- Dept of Electrical Enginrg