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Fabrication of 3-dimensional structure MOSFET embodied in the convex corner of the silicon microfluidic channel

Title
Fabrication of 3-dimensional structure MOSFET embodied in the convex corner of the silicon microfluidic channel
Authors
임근배
POSTECH Authors
임근배
Date Issued
6-Nov-2002
Publisher
Microprocesses and Nanotechnology 2002,
URI
http://oasis.postech.ac.kr/handle/2014.oak/63852
Article Type
Conference
Citation
Microprocesses and Nanotechnology 2002, page. 334 - 335, 2002-11-06
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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