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Formation of a vertical MOSFET for charge sensing in Si micro-fluidic channel

Title
Formation of a vertical MOSFET for charge sensing in Si micro-fluidic channel
Authors
임근배
POSTECH Authors
임근배
Date Issued
27-Feb-2003
Publisher
한국반도체학술대회
URI
http://oasis.postech.ac.kr/handle/2014.oak/63851
Article Type
Conference
Citation
한국반도체학술대회 2003, page. 825 - 826, 2003-02-27
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임근배LIM, GEUN BAE
Dept of Mechanical Enginrg
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