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Fabrication and characterization of 3-Dimensional MOS transistor tip integrated micro cantilever
- Title
- Fabrication and characterization of 3-Dimensional MOS transistor tip integrated micro cantilever
- Authors
- 임근배; Sanghoon Lee; Wonkyu Moon
- Date Issued
- 2005-06-10
- Publisher
- HARMST
- Article Type
- Conference
- Citation
- HARMST, 2005, 2005-06-10
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Related Researcher
- 임근배LIM, GEUN BAE
- Dept of Mechanical Enginrg