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초음속 CO2 나노입자빔을 이용한 10nm 표면오염입자 제거 실험

Title
초음속 CO2 나노입자빔을 이용한 10nm 표면오염입자 제거 실험
Authors
이진원김인호김의재최민석
POSTECH Authors
이진원
Date Issued
26-May-2011
Publisher
마이크로나노공학회
URI
http://oasis.postech.ac.kr/handle/2014.oak/63153
Article Type
Conference
Citation
마이크로나노공학회 춘계학술대회, 2011-05-26
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이진원LEE, JIN WON
Dept of Mechanical Enginrg
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