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초음속 CO2 나노입자빔을 이용한 10nm 표면오염입자 제거 실험
- Title
- 초음속 CO2 나노입자빔을 이용한 10nm 표면오염입자 제거 실험
- Date Issued
- 2011-05-26
- Publisher
- 마이크로나노공학회
- Article Type
- Conference
- Citation
- 마이크로나노공학회 춘계학술대회, 2011-05-26
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Related Researcher
- 이진원LEE, JIN WON
- Dept of Mechanical Enginrg