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Effect of deposition temperature on metal-insulator-metal capacitors fabricated using a mixed alkylamido-cyclopentadienyl zirconium precursor
- Title
- Effect of deposition temperature on metal-insulator-metal capacitors fabricated using a mixed alkylamido-cyclopentadienyl zirconium precursor
- Date Issued
- 2012-11-07
- Publisher
- The Society of Chemical Engineers, Japan (SCEJ)
- Article Type
- Conference
- Citation
- 10th Japan-Korea Symposium on Materials & Interface International Symposium on Frontiers in Chemical Engineering, 2012-11-07
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