Silicate Replica Molds from Polysilazane and Sol-Gel Hybrid Resin for Nanoimprint Lithography
- Silicate Replica Molds from Polysilazane and Sol-Gel Hybrid Resin for Nanoimprint Lithography
- POSTECH Authors
- Date Issued
- Center for Nanoscale Mechatronics & Manufacturing
- Article Type
- The 5th International Symposium on Nanoscale Mechantronics&Manufacturing, 2010-08-20
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