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VTMS(vinyltrimethylsilane)를 이용한 저유전 SiCOHCxHy 이중상 박막의 원거리 플라즈마 화학증착
- Title
- VTMS(vinyltrimethylsilane)를 이용한 저유전 SiCOHCxHy 이중상 박막의 원거리 플라즈마 화학증착
- Authors
- 박종민
- Date Issued
- 2002
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001906002
https://oasis.postech.ac.kr/handle/2014.oak/6223
- Article Type
- Thesis
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