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Elevated 소스드레인 형성을위한 Solid Phase Epitaxy와 선택적 에칭에 관한 연구
- Title
- Elevated 소스드레인 형성을위한 Solid Phase Epitaxy와 선택적 에칭에 관한 연구
- Authors
- 박인수
- Date Issued
- 2002
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001905924
https://oasis.postech.ac.kr/handle/2014.oak/6152
- Article Type
- Thesis
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