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간섭 리소그래피와 DRIE를 이용한 다양한 주기적 나노 구조의 제작

Title
간섭 리소그래피와 DRIE를 이용한 다양한 주기적 나노 구조의 제작
Authors
김준원변익주
POSTECH Authors
김준원
Date Issued
1-Apr-2010
Publisher
한국 MEMS 학술대회 운영위원회
URI
http://oasis.postech.ac.kr/handle/2014.oak/61464
Article Type
Conference
Citation
The 12th Korean MEMS Conference, 2010-04-01
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김준원KIM, JOON WON
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