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Chloride 화합물과 Alkoxide 화합물을 이용한 Zirconium Silicate 박막의 원자층 화학증착
- Title
- Chloride 화합물과 Alkoxide 화합물을 이용한 Zirconium Silicate 박막의 원자층 화학증착
- Authors
- 김원규
- Date Issued
- 2002
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001905910
http://oasis.postech.ac.kr/handle/2014.oak/6138
- Article Type
- Thesis
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