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Effects of W Diffusion Barrier on Inhibition of AlN Formation in Ti/Al based Ohmic Contacts on N-polar N-GaN
- Title
- Effects of W Diffusion Barrier on Inhibition of AlN Formation in Ti/Al based Ohmic Contacts on N-polar N-GaN
- Date Issued
- 2012-02-16
- Publisher
- 제 19회 반도체 학술대회
- Article Type
- Conference
- Citation
- 제 19회 반도체 학술대회, 2012-02-16
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Related Researcher
- 이종람LEE, JONG LAM
- Dept of Materials Science & Enginrg