Open Access System for Information Sharing

Login Library

 

Conference
Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

Removal of 10nm contaminant particles from a wafer surface with supersonic CO2 particle beam

Title
Removal of 10nm contaminant particles from a wafer surface with supersonic CO2 particle beam
Authors
이진원김인호김의재
POSTECH Authors
이진원
Date Issued
15-Jun-2011
Publisher
Clean tech
URI
http://oasis.postech.ac.kr/handle/2014.oak/59936
Article Type
Conference
Citation
Nanotech 2011, 2011-06-15
Files in This Item:
There are no files associated with this item.

qr_code

  • mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher

이진원LEE, JIN WON
Dept of Mechanical Enginrg
Read more

Views & Downloads

Browse